Rigaku 10C-9020-K010 (L010) flange mount RMS F1 (F2)-5 solid shaft Rotary Vacuum Feedthrough

Model

F1 (F2)-5

F1 (F2)-6

F1 (F2)-10

F1 (F2)-12

Product No.

10C-9020-K010 (L010)

10C-9020-J020 (K020)

10C-9020-J030 (K030)

10C-9020-J040 (K040)

Transmission
torque (N-m)

1

1.6

8

13

Max speed
(rpm)

15000

15000

12000

10000

A (mm)

5

-0.010
-0.022

6

-0.010
-0.022

10

-0.013
-0.028

12

-0.016
-0.034

B (mm)

26

40

44

54

C (mm)

6

8

8

10

D (mm)

15

15

23

40

E (mm)

15

15

23

30

F (mm)

36

52

70

80

G (mm)

16

-0.1
-0.2

28

-0.1
-0.2

36

-0.1
-0.2

40

-0.1
-0.2

H

6- φ 4.3
PB28

6- φ 4.5
PD40 (43)

6- φ 6.7
PD58.7

6- φ 7.0
PD65.0

P (mm)

18

24 (30)

42

45

Q (mm)

2.1

2.7

2.7

2.7

X (mm)

20

28.5

51.5 (31.5)

52 (42)

Y (mm)

22.7

28

35

43

O-ring
(fluororubber)

S18

S24 (S30)

S42

S45

Bearing type

695

636

6200

6201

Shaft end
shape

K

L

M

M

a (mm)

—

10

20

25

b (mm)

—

0.5

1.8

2.5

c (mm)

—

—

3

+0.025
0

4

+0.030
0