Rigaku 10C-9020-M020 nut baseplate mount RMS-LS-6 solid shaft Rotary Vacuum Feedthrough

Model

LS-5

LS-6

LS-10

LS-12

Product No.

10C-9020-M010

10C-9020-M020

10C-9020-M030

10C-9020-M040

Transmission
torque (N-m)

1

1.6

8

13

Max speed (rpm)

15000

15000

12000

10000

A (mm)

5

-0.010
-0.022

6

-0.010
-0.022

10

-0.013
-0.028

12

-0.016
-0.034

B (mm)

26

40

44

54

C (mm)

6

8

8

10

D (mm)

15

15

23

30

E (mm)

15

15

23

30

F (mm)

28

42

48

58

G

M18 × 1.5

M28 × 2

M36 × 1.5

M45 × 1.5

H (mm)

4

6

6

6

I (mm)

1

3

3

3

J (mm)

18

0
-0.2

28

0
-0.2

36

45

0
-0.2

P (mm)

20

32

40

50

Q (mm)

2.1

2.7

2.7

2.7

X(mm)

19.3

25.5

31.5

42

Y(mm)

22.6

29

35

43

O-ring
(fluororubber)

S20

S32

S40

S50

Bearing type

695

636

6200

6201

Nut U / R (mm)

28 / 5

42 / 5

46 / 8

58 / 10

Washer T / S (mm)

28 / 2

42 / 2

46 / 3

58 / 2

Shaft end shape

K

L

M

M

a (mm)

—

10

20

20

b (mm)

—

0.5

1.8

2.5

c (mm)

—

—

3

+0.025
0

4

+0.030
0