Rigaku RMS F1-HS-12W water cooled 10C-9020-E020 flange hollow shaft vacuum ferrofluid feedthrough

Model

F1-HS-
10W

F1-HS-
12W

F1-HS-
20W

F1-HS-
24W

F1-HS-
26W

Product no.

10C-9020-
E010

10C-9020-
E020

10C-9020-
E030

10C-9020-
E040

10C-9020-
E050

A (mm)

10

+0.015
0

12

+0.018
0

20

+0.021
0

24

+0.021
0

26

+0.021
0

B (mm)

—

—

64

-0.010
-0.029

70

-0.010
-0.029

70

-0.010
-0.029

C (mm)

70

70

105

105

116

D (mm)

—

—

10

10

10

E (mm)

8

8

10

10

10

F (mm)

84

84

116

120

130

G (mm)

52

52

64

76

76

H

6- φ 6.5 PD70

6- φ 6.5 PD70

4- φ 9 PD96

4- φ 9 PD96

4- φ 9 PD110

J (mm)

17

17

28

30

32

K (mm)

7

7

11

10

10

L (mm)

2.1

2.1

2.1

2.7

2.7

M (mm)

19

19

18

16

20

N (mm)

—

—

—

38

40

P (mm)

50

50

70

75

85

Q (mm)

2.7

2.7

4.1

4.1

4.1

V

2-Rc1/8

2-Rc1/8

2-Rc1/8

4-Rc1/8

4-Rc1/8

X/Y (mm)

9 / 51.5

9 / 51.5

13 / 79

10.5 / 84

14.5 / 90

Flange O-ring

S50

S50

G70

G75

G85

Shaft O-ring (2 pcs)

S10

S12

S20

S24

S26

Bearing type

16003

16003

60/28

6006

60/32

Max speed (rpm)

6000

6000

6000

4000

4000

Product no.

10C-9020-
F010

10C-9020-
F020

10C-9020-
F030

10C-9020-
F040

10C-9020-
F050

C series

a (mm)

36

38

48

52

52

b (mm)

12

12

15

15

15