The function of a vacuum feedthrough
In epitaxial growth equipment, maintaining a vacuum is non-negotiable. Vacuum pumps evacuate air, and vacuum gauges monitor pressure to ensure the required level is achieved. This environment is essential for producing high-quality semiconductor layers. A ferrofluid seal is a primary technology for preserving this vacuum state. It prevents gas leakage even while an internal shaft is rotating, allowing motion to be transmitted into the vacuum chamber without breaking the seal.
Technical demands in semiconductor fabrication
The drive for more efficient power semiconductors relies on materials like silicon carbide (SiC) and gallium nitride (GaN). Improved epitaxial growth techniques for these materials are expected to advance device performance. This progression places greater demands on supporting components. The feedthrough must operate reliably under severe conditions, providing a hermetic seal for rotating shafts. Over three decades of specialized development in magnetic fluid feedthrough technology has been necessary to meet the exceptional reliability standards required in this field.
Design considerations for reliability
Choosing the appropriate type of ferrofluid seal depends on the specific application. For multi-station epitaxial reactors, a tri-axle design allows for complex motion transfer. The technology must handle the thermal and chemical environments present during growth processes. Recent innovations from organizations like NASA's Kennedy Space Center focus on feedthroughs for severe environments and temperatures, indicating the broader industrial push for more strong sealing solutions. This design philosophy directly applies to the harsh conditions inside epitaxial chambers.
We develop and supply these specialized feedthroughs for advanced manufacturing applications.